| 摘要 |
PROBLEM TO BE SOLVED: To manufacture an optical coupler capable of optically coupling an optical fiber with an optical waveguide with high efficiency and high reliability without an aligning work by using only a batch processing by a wafer process and without using any mechanical method. SOLUTION: After a spare groove (a recessed groove) is provided on a Si substrate surface between an optical waveguide forming part 6 and an optical fiber guiding groove forming part 7, anisotropic etching is executed. In such a manner, a groove 8 in which a recess composed of plural planes (Si (111) plane) 10a, 10b is formed at an inner surface is provided between the optical waveguide forming part 6 and the optical fiber guiding groove forming part 7. |
