发明名称 FILM CARRIER AND MANUFACTURE THEREOF
摘要 PROBLEM TO BE SOLVED: To produce a film carrier having high through-hole reliability by providing conductive parts formed by burying conductive wires in through-holes. SOLUTION: Wires 4 are bonded to through-holes 3 of 50μm diameter formed by an excimer laser through a polyimide film 1 75μm thick. After feeding the wire 4, without cutting it, it is bonded again to each hole 3 and cut to form a conductive part 3a. Cu is vapor-deposited to form a Cu layer 2 (upper surface 1). After cutting the wire and fed, the second bonding may be applied to the upper surface Cu layer, without twice bonding at the same hole. Thereafter the wire is cut. Thus it is possible to obtain a film carrier having a high through-hole reliability at low cost in a simple process.
申请公布号 JPH09306955(A) 申请公布日期 1997.11.28
申请号 JP19960124493 申请日期 1996.05.20
申请人 TOPPAN PRINTING CO LTD 发明人 OTA TADAKATSU
分类号 H01L21/60;(IPC1-7):H01L21/60 主分类号 H01L21/60
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