| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas laser device which makes a life of a preliminary ionization electrode which carries out preliminary ionization in a gas laser device long, reduces contamination of an inside of a laser tube and realizes improvement of reliability of a laser tube and long life of a laser tube. SOLUTION: In a gas laser device which generates laser light by exciting gas by discharge between a pair of main discharge electrodes, a discharge line is formed by arranging a discharge electrode 11 whose outer circumference is covered with a dielectric 13 and a discharge electrode 12 arranged in opposition to the electrode along a main discharge electrode 2 or 3, silent discharge which is accompanied by light emission is generated between a pair of discharge electrodes 11, 12 by applying a high frequency high voltage to a discharge line and gas is preliminarily ionized by casting ultraviolet ray generated by silent discharge on gas between the main discharge electrodes 2, 3. |
