| 摘要 |
PROBLEM TO BE SOLVED: To provide a polyester film which shows excellent base follow-up property for a base having projection and recessed shape and is used in a support body layer of a photoresist film which excels in resolution. SOLUTION: A polyester film consists of copolymer polyester which is composed mainly of polyethylene terephthalate and has the melting point of 210 to 250 deg.C of 99 to 55weight% and copolymer polyester which is composed mainly of polybuthylene terephthalate or polybuthylene terephthalate and has the melting point of 180 to 223 deg.C of 1 to 45weight%, contains lubricant of which average particle diameter is 2.5μm or less, and a face orientation coefficient of the film is 0.08 to 0.16.
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