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发明名称
HEAT TREATING FURNACE
摘要
申请公布号
JPH09306860(A)
申请公布日期
1997.11.28
申请号
JP19960143579
申请日期
1996.05.13
申请人
KOKUSAI ELECTRIC CO LTD
发明人
SUZUKI MASAYUKI
分类号
H01L21/22;H01L21/26;H01L21/324;(IPC1-7):H01L21/26
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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