| 摘要 |
PROBLEM TO BE SOLVED: To enable a curved wafer to stably access to a cassette. SOLUTION: Positions adjacent to shelves 13 of a cassette 1 at respective heights of the shelves in a Y direction to the shelves 13 are called insertion positions of paddles 34 for wafer extraction. When it is desired to extract the wafer 2, air suction of the paddle 34 is stopped, the extended paddle is inserted at the insertion position corresponding to the shelf 13 to be extracted, horizontally moved to a central part of the wafer 2, air-sucked, and then contracted to extract the wafer. When it is desired to house the cassette 1, the paddle 34 having the wafer air-sucked thereon is set to be above the position of the shelf 13 to be mounted and at a height somewhat larger than an upper curved amountΔz2 , extended to insert the wafer 2 into the cassette 1, and the air- suction is released to mount the wafer 2 onto the shelf 13.
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