| 摘要 |
PROBLEM TO BE SOLVED: To provide a displacement quantity converting mechanism which is constituted in a small size and obtains high two-dimensional positiioning precision. SOLUTION: Thin mechanism is equipped with a 1st driving means 15 which operates in a 1st direction, a 1st moving member 14 which is held by a link mechanism in parallel to a fixed part 11 and displaced by the 1st driving means, a 2nd driving means 19 which operates in a 2nd direction, and a 2nd moving member 18 which is held by a link mechanism in parallel to the fixed part and displaced by the 2nd driving means. Then when one of the driving means 15 and 19 is displaced byΔx0 orΔy0 through the operation of the corresponding driving means 15 or 19, the other driving means 19 or 15 is driven and controlled so as to cancel error displacementδy orδx generated in the displacement direction, i.e., the 2nd direction (y) or the 1st direction (x) perpendicular to the 1st direction (x) or the 2nd direction (y).
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