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发明名称
Belichtungsapparat mit zwei Beleuchtungssystemen und diesen verwendendes Belichtungsverfahren
摘要
申请公布号
DE69220985(T2)
申请公布日期
1997.11.27
申请号
DE19926020985T
申请日期
1992.03.05
申请人
CANON K.K., TOKIO/TOKYO, JP
发明人
ISOHATA, JUNJI, C/O CANON KABUSHIKI KAISHA, OHTA-KU, TOKYO, JP
分类号
G02F1/1343;G02F1/13;G03F7/20;H01L21/027;H01L21/30;(IPC1-7):G03B27/53
主分类号
G02F1/1343
代理机构
代理人
主权项
地址
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