Air-supply hood system for photolithography in semiconductor manufacture

摘要

The system includes an air supply hood (2) on the periphery of a reduction projection lens (1) which is divided into several sections by several air baffles (3), while several air supply lines (4) supply air of preset temperature to each section of the hood. Preferably the air baffles are distributed along the periphery of the reduction lens. The temperature of air supplied to each section of the hood is different. Alternatively the supply air temperature may be the same. Typically the air supply hood is in the form of a hollow cylinder.