发明名称 Two=part holder for melting crucible mounting
摘要 Fitting a melting crucible onto a holder in a semiconductor single crystal pulling apparatus involves: (a) separating the holder (10) into a bottom portion (11) and a barrel portion (12); (b) fitting the crucible (1) on the bottom portion (11); and (c) assembling the holder (10) by joining the barrel portion (12) to the bottom portion (11). Also claimed is (i) assembly equipment for carrying out the above method; and (ii) a holder for use in the above method.
申请公布号 DE19717380(A1) 申请公布日期 1997.11.27
申请号 DE1997117380 申请日期 1997.04.24
申请人 MITSUBISHI MATERIALS SILICON CORP., TOKIO/TOKYO, JP;MITSUBISHI MATERIALS CORP., TOKIO/TOKYO, JP 发明人 YAMAZAKI, MASAKAZU, TOKIO/TOKYO, JP;YANABA, MICHIO, TOKIO/TOKYO, JP;TAGUCHI, HIROAKI, TOKIO/TOKYO, JP;ATAMI, TAKASHI, TOKIO/TOKYO, JP;FURUYA, HISASHI, TOKIO/TOKYO, JP
分类号 C30B15/00;C30B15/10;C30B15/30;C30B29/06;H01L21/208;(IPC1-7):C30B15/10 主分类号 C30B15/00
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