发明名称 |
Vaporizer apparatus |
摘要 |
<p>Heat can be supplied effectively to a porous member of a vaporizer apparatus so that the vaporizing operation can be carried out smoothly and efficiently. The vaporizer apparatus comprises a vaporizer section (B) having a porous member (9) including a liquid receiving surface and a vapor discharge surface; a feed supply section (A) for supplying a liquid feed material to the liquid receiving surface of the porous member; a heating medium passage (P1) in thermal contact with the porous member; and a heating medium supply system for flowing a heating medium (L2) of a temperature higher than a vaporization temperature of the liquid feed material, through the heating medium passage. <IMAGE></p> |
申请公布号 |
EP0808916(A2) |
申请公布日期 |
1997.11.26 |
申请号 |
EP19970108398 |
申请日期 |
1997.05.23 |
申请人 |
EBARA CORPORATION |
发明人 |
HORIE, KUNIAKI;OGURE, NAOAKI;FUKUNAGA, YUKIO;HONGO, AKIHISA |
分类号 |
B01D1/00;C23C16/448;(IPC1-7):C23C16/00 |
主分类号 |
B01D1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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