发明名称 Vaporizer apparatus
摘要 <p>Heat can be supplied effectively to a porous member of a vaporizer apparatus so that the vaporizing operation can be carried out smoothly and efficiently. The vaporizer apparatus comprises a vaporizer section (B) having a porous member (9) including a liquid receiving surface and a vapor discharge surface; a feed supply section (A) for supplying a liquid feed material to the liquid receiving surface of the porous member; a heating medium passage (P1) in thermal contact with the porous member; and a heating medium supply system for flowing a heating medium (L2) of a temperature higher than a vaporization temperature of the liquid feed material, through the heating medium passage. &lt;IMAGE&gt;</p>
申请公布号 EP0808916(A2) 申请公布日期 1997.11.26
申请号 EP19970108398 申请日期 1997.05.23
申请人 EBARA CORPORATION 发明人 HORIE, KUNIAKI;OGURE, NAOAKI;FUKUNAGA, YUKIO;HONGO, AKIHISA
分类号 B01D1/00;C23C16/448;(IPC1-7):C23C16/00 主分类号 B01D1/00
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