Control system for controlling a plurality of vacuum pumps

摘要

A vacuum pump control system is used for controlling a plurality of vacuum pumps (10) comprising at least one type of cryopump, turbomolecular pump, cryoturbo pump, and dry pump such as a Roots type vacuum pump. The vacuum pump control system for controlling a plurality of vacuum pumps (10), comprises a host computer (4); a plurality of vacuum pump controllers (2) connected respectively to said vacuum pumps (10); and a network control unit (3) for transmitting information between the host computer (4) and the vacuum pump controllers (2). The vacuum pump controllers (2) are connected in parallel to the network control unit (3) by respective communication lines.