发明名称 Process for forming epitaxial BaF2 on GaAs
摘要 A process for growing single crystal epitaxial BaF2 layers on gallium arsenide substrates by slowly reacting Ba, BaCl2, Bal2, BaBr2, BaF2.BaCl2, BaF2.BaBr2, BaF2.BaI2, BaCl2.BaBr2, Ba3(GaF6)2, BAH2, or BaO2 vapor with a clean, hot GaAs substrate at 500 DEG C. to 700 DEG C. in high vacuum until a uniform, thin ( DIFFERENCE 12 ANGSTROM ) layer of reaction product is formed and then vapor depositing BaF2 onto the reaction layer at room temperature to 400 DEG C. to form the single crystal, epitaxial BaF2 layer.
申请公布号 US5690737(A) 申请公布日期 1997.11.25
申请号 US19950454983 申请日期 1995.05.31
申请人 THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE NAVY 发明人 SANTIAGO, FRANCISCO;CHU, TAK-KIN;STUMBORG, MICHAEL
分类号 C30B23/02;C30B25/02;(IPC1-7):C30B25/18 主分类号 C30B23/02
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