Integrated structure current sensing resistor for power devices particularly for overload self-protected power MOS devices

摘要

In integrated structure sensing resistor for a power MOS device consists of a doped region extending from a deep body region of at least one cell of a first plurality of cells, constituting a main power device, to a deep body region of a corresponding cell of a second smaller plurality of cells constituting a current sensing device. The first plurality of cells and the second plurality of cells are formed using trench technology.