ROBOT DEVICE WITH CLEANING FUNCTION AND CLEANING METHOD

摘要

PROBLEM TO BE SOLVED: To improve the quality of products and reduce the cost thereof by forming the inexpensive clean space where various types of precision machining and assembly devices for manufacturing products in environment cleaner than general environment can be installed in the general environment, and substantial investment and maintenance cost necessary for a clean environment facility such as a general clean room and a clean space passage device are not needed. SOLUTION: This robot device with a cleaning function is formed to have an arm 12 with a holding part 21 to retain a processing object 4, an arm drive means for causing the motion of the arm 12 so as to move the processing object 4 to a processing position 5, and the first nozzle 22 formed to have a blow hole 223 larger than the processing object 4 and to blow cleaning gases in such a state as enveloping the processing object 4 for the isolation thereof from external environment. The processing object 4 is held with the robot device and processed under cleaning.