发明名称 |
Method for recharging of silicon granules in a Czochralski single crystal growing operation |
摘要 |
A recharger system including a feeder and a feed conduit recharge polycrystalline silicon granules into a crucible after a run or operation of growing a single crystal silicon rod by the Czochralski method, thereby to prepare for a next run of crystal growing. The amount of holdup or backed-up supply of the silicon granules in the feed conduit is detected by a sensor provided on the feed conduit. A smooth and high-rate feed of the silicon granules is ensured by controlling the feed rate of the silicon granules from the feeder to the feed conduit and/or a descending velocity of the crucible by signals generated in the sensor as a function of the amount of the holdup or backed-up supply in the feed conduit.
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申请公布号 |
US5690733(A) |
申请公布日期 |
1997.11.25 |
申请号 |
US19950552494 |
申请日期 |
1995.11.09 |
申请人 |
SHIN-ETSU HANDOTAI CO., LTD. |
发明人 |
NAGAI, NAOKI;ODA, MICHIAKI;OHTSUKA, SEIICHIRO;HARADA, ISAMU |
分类号 |
C30B15/20;C30B15/02;C30B29/06;C30B35/00;(IPC1-7):C30B15/04
L7/06;(IPC1-7):H03L7/06 |
主分类号 |
C30B15/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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