发明名称 CLEANSING COMPOSITION AND METHOD FOR CLEANING
摘要 PROBLEM TO BE SOLVED: To efficiently clean a metal processing part, a glass processing part, a ceramic processing part, a silicon wafer, etc. SOLUTION: This cleansing composition is composed of 0.2-20 pts.wt. of a nonionic surfactant, 0.1-10 pts.wt. of water and the balance of a nonaqueous solvent based on 100 pts.wt. in total. The cleansing composition has a clouding point in a temperature range from 10 to 90 deg.C, and forms a W/O-type emulsion at temperatures over the clouding point. By using the cleansing composition, a part is cleaned at a temperature over the clouding point of the cleansing composition and the cleansing composition is substituted with a rinsing liquid at a temperature below the clouding point.
申请公布号 JPH09302391(A) 申请公布日期 1997.11.25
申请号 JP19960116356 申请日期 1996.05.10
申请人 OLYMPUS OPTICAL CO LTD 发明人 TOMITANI MANABU
分类号 C11D10/02;C23G5/032;C23G5/06;H01L21/304;H05K3/26;(IPC1-7):C11D10/02 主分类号 C11D10/02
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