Electron beam exposure device with scanning electron microscope

摘要

The device includes a main control unit (401), an electron gun, a beam deflection amplifier (209), a secondary-electron detector, a digitiser (207) and an image memory (204). A first selector (210) connects the digitiser to either the output (2B) of the deflection amplifier (for checking) or the secondary-electron detection signal (2A). A second selector (211) connects the image memory to either the data bus (205) or an image convertor (203) driving a display unit (102). When the scanning electron microscope (SEM) is functioning the memory temporarily stores the secondary-electron signal in digital form.