Slurry recycling in CMP system,申请号IL19970121091-传众专利搜索

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发明名称	Slurry recycling in CMP system
摘要
申请公布号	IL121091(D0)	申请公布日期	1997.11.20
申请号	IL19970121091	申请日期	1997.06.17
申请人	INTEGRATED PROCESS EQUIPMENT CORP.	发明人
分类号	B24B37/04;B24B55/03;B24B57/00;(IPC1-7):H01L	主分类号	B24B37/04
代理机构		代理人
主权项
地址

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