Method and device for measuring displacement,申请号EP19920308716-传众专利搜索

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发明名称	Method and device for measuring displacement
摘要
申请公布号	EP0534757(B1)	申请公布日期	1997.11.19
申请号	EP19920308716	申请日期	1992.09.24
申请人	CANON KABUSHIKI KAISHA	发明人	SENTOKU, KOICHI;MATSUMOTO, TAKAHIRO;NOSE, NORIYUKI;YOSHII, MINORU;SAITOH, KENJI
分类号	G03F7/20;G03F9/00;(IPC1-7):G03F9/00	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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