Heating elements and a process for their manufacture

摘要

Disclosed is a heating element having improved performance, particularly at high power densities and high temperatures. The heating element comprises a substrate having a first layer comprising a silicon based electrically insulating material on it surface. On a surface of the first layer is a second layer comprising a silicon based electrically resistive material. Attached to the second layer is at least two separate areas of silicon based electrically conductive material, each of said areas suitable for connection to a power supply.