Mask holder for a flat panel exposure device

摘要

The mask plate support structure is used in a photoetching installation having a fixed horizontal frame (10) and the support structure is attached to a rectangular mask plate (14) for maintaining the plate in the horizontal plane. The plate holds a glass cover (16). A command mechanism (24) allows the support structure to be attached to the mask plate. Displacement mechanisms (20,22) give movement in two planes. These mechanisms include motors associated with control circuits having memories storing angle values, with the motors controlling X-Y movement of support table structures.