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发明名称
摘要
申请公布号
JP2679421(B2)
申请公布日期
1997.11.19
申请号
JP19910012753
申请日期
1991.01.09
申请人
发明人
分类号
C23C2/28;C23C2/40;(IPC1-7):C23C2/28
主分类号
C23C2/28
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