| 摘要 |
PROBLEM TO BE SOLVED: To prevent a sublimate generated from a substrate from being deposited on the substrate as foreign matter by annexing a sublimate filter replaceably on this side of the exhaust hole of of an exhaust chamber. SOLUTION: An exhaust hole 4 and a suction hole 5 are provided to the oven 8 of a postbake oven device 9, and the air in the oven 8 is exhausted from the exhaust hole 4 or the air is sucked into the oven 8 from the suction hole 5 by an exhausting and sucking means such as an air pump. Air tends to stagnate in the oven 8, and the sublimate generated from a substrate 1 is accumulated in the oven 8 in the postbake oven device. Accordingly, the air in the oven 8 is forcedly exhausted from the exhaust hole 4 to discharge the sublimate contained in the air in the oven 8. Consequently, the sublimate accumulated in the oven 8 is prevented from being cooled and deposited in the oven 8 as a deposit. |
