| 摘要 |
PROBLEM TO BE SOLVED: To carry out prelignment in a prealignment device while preventing a photosensitive substrate from coming into contact with an alignment mechanism of the device. SOLUTION: In this device, a photosensitive substrate PL is roughly aligned to a projecting optical system 15 by moving a holder 17 which holds the photosensitive substrate PL on a stage 16 which can be freely moved along the xyz directions andθdirection when a circuit pattern formed on a mask 14 is transferred by exposure to the photosensitive substrate by the projecting optical system 15. In this method, the edge of the photosensitive substrate PL carried on the stage 16 is photographed on at least three referential predetermined points on the holder 17 by a photographing means 36, and the obtd. image is processed by an image processing means 40. Thereby, the position information of the photosensitive substrate PL to the projection optical system 15 is detected based on the obtd. image information. |
