Atomic force microscope using cantilever attached to optical microscope

摘要

Without necessitating complicated operations, an image of a low to medium magnification and an image of a high magnification are efficiently observed by an optical microscope and by an atomic force microscope, respectively. In the atomic force microscope, an atomic force microscope probe, whose size has been reduced since a device for detecting interatomic force is provided by a piezoelectric film, piezoresistance, or the like, is disposed between an objective lens of the optical microscope and a sample to be observed or at a position of the objective lens when the objective lens and the probe are constructed so as to be interchangeable, thereby enabling the optical microscope to confirm a scanning position of the atomic force microscope.