| 摘要 |
An opto-electronic accelerometer and pressure sensor formed on a substrate are disclosed. The sensor includes a light source and a plurality of light detectors exposed on a semiconductor substrate. A cantilever beam extends over the substrate. The cantilever beam is positioned such that it reflects light from the light source as an applied force urges the cantilever beam to deflect relative to the plurality of light detectors. Acceleration or pressure can be determined by the slope change of the cantilever beam and is computed by taking the ratio of illumination between corresponding light detectors. In an alternative embodiment, the cantilever beam includes a proof mass. In a further embodiment, a pressure sensor is coupled with a linkage rod which is connected to the cantilever beam and then connected to a diaphragm which is displaced as a pressure is applied. In another embodiment, a diaphragm extends over a substrate, and pressure is measured as a function of the change in the diaphragm curvature as the diaphragm reflects light from the light source to deflect relative to a plurality of light detectors. The sensor further includes an electronic signal processing chip to calculate acceleration and pressure.
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