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发明名称
MANUFACTURE OF ELECTRODE FOR DRY ETCHING DEVICE
摘要
申请公布号
JPH09298190(A)
申请公布日期
1997.11.18
申请号
JP19960135871
申请日期
1996.05.02
申请人
IWAKI COATING KOGYO:KK
发明人
TOMONARI SETSUO
分类号
C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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