发明名称 Probe head, method for manufacturing the same, and inspecting method using the same
摘要 Probes include proximal ends electrically connected to the respective conductive patterns of said insulating substrate, and free ends for being contact with the respective electrode pads of the object. The probes can be buckled in such a manner that the free ends are brought into contact with the respective electrode pads of the object under a predetermined contact pressure. Probes are formed from a wire for wire bonding by means of a wire bonder, and include proximal ends wire-bonded to each corresponding conductive patterns on the insulating substrate, and free ends formed by being cut after the wire is wire-bonded to a dummy substrate.
申请公布号 US5689193(A) 申请公布日期 1997.11.18
申请号 US19950504558 申请日期 1995.07.20
申请人 TOKYO ELECTRON LIMITED 发明人 MATSUDA, KAORU
分类号 G01R31/04;G01R1/067;G01R1/073;H01L21/66;(IPC1-7):G01R1/04;G01R31/28 主分类号 G01R31/04
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