| 摘要 |
PROBLEM TO BE SOLVED: To accurately detect the occurrence of abnormality of a blade tip or the like by computing the luminance value distribution data of a detection luminance area, which is set in a blade tip of a chip, between images, and taking out a luminance value of a failure part of the detection area, and detecting the occurrence of abnormality of the chip on the basis of the luminance value. SOLUTION: When setting of detection area is concluded, different image processing I, II are carried on. In the image processing I, primary differential of an image of the detection area is performed, and a luminance value of a part, in which concentration is suddenly changed, is left. In the image processing II, image of the detection area is equalized so as to be substituted with a mean value of eight image elements in the periphery, and computing between images is performed on the basis of the luminance value distribution obtained by the image processing I, II. As a result, luminance value of a normal part Ca and a blackened part Cb become 0, and the only luminance value of a failure part Cc can be detected. With this structure, even in the case where blade tip of the chip is blackened by the heat or dirt is adhered to the blade tip of the chip, a small abnormality generated in the blade chip of the chip can be securely detected. |
