| 摘要 |
PROBLEM TO BE SOLVED: To uniformize and stabilize the electron emitting characteristic, and improve the electron emitting efficiency by uniformly forming an electron emitting part, particularly, in surface conductive type, so that the width of a crack is 50nm or less, and the length corresponding to voltage application is 5nm or less. SOLUTION: This element has a base 1, opposed element electrodes 4, 5, and a conductive film 3 formed of fine particle film, and an electron emitting part 2 formed of a crack by electric forming is formed on the film 3. The crack width is uniformly set to 50nm or less and, preferably, the voltage application corresponding length is uniformly set to 5nm or less. Namely, the electric forming is performed in the atmosphere containing a gas for promoting the coagulation of the film 3 by applying a pulse voltage preferably in a prescribed wave height value. As the gas, reductive H2 , CO or the like is used when the film 3 is formed of a metal oxide, to coagulate the film 3 in reduction. Thus, the power necessary for treatment is reduced, and since the emitting part 2 is formed when the resistance value of the film 3 is reduced to the same value, the dispersion between elements is suppressed. |
