发明名称 |
Rapid thermal heating apparatus and control therefor |
摘要 |
A rapid thermal heating apparatus in which lamps are disposed in a plurality of light pipes arranged to illuminate and supply heat to a substrate. The light pipes are positioned so that the illumination patterns overlap. The energy supplied to the lamps is controlled to provide a predetermined heating pattern to the substrate. A liquid cooled window cooperates with the light pipes to transmit energy to a wafer disposed in an evacuated chamber.
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申请公布号 |
US5689614(A) |
申请公布日期 |
1997.11.18 |
申请号 |
US19950509392 |
申请日期 |
1995.07.31 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
GRONET, CHRISTIAN M.;GIBBONS, JAMES F. |
分类号 |
C23C16/48;C30B25/10;C30B31/12;C30B31/18;F27B17/00;F27D99/00;G01J5/00;G01J5/06;H01L21/00;H02G3/04;(IPC1-7):H05B3/40;C23C16/00 |
主分类号 |
C23C16/48 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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