RADIATION SENSITIVE RESIN COMPOSITION

摘要

PROBLEM TO BE SOLVED: To obtain a radiation sensitive resin compsn. especially useful as a chemical amplification type resist excellent in the resolution of contact holes, cross-sectional shape and focus latitude. SOLUTION: This resin compsn. contains a polymer (A) having at least one kind of group selected from among substituents having acid-decomposable acetal, ketal and t-butyl groups, a radiation sensitive acid generating agent (B), an acetal deriv. and/or a ketal deriv. (C) having a phenolic hydroxyl group and a mol.wt. of <1,000 and an acid diffusion controlling agent (D).