X-RAY OPTICAL APPARATUS AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an X-ray optical apparatus and device manufacturing method which has an illumination optical system which realizes incoherent illumination and allows the max. performance of its image-forming system to be exhibited. SOLUTION: This X-ray optical system scans an X-ray beam 703 at angles by two oblique incident total reflection mirrors, one nearly perpendicular incident beam deflection mirror or quasi-conical internal beam deflection mirror 705, its angle distribution is adequately set to control the angle distribution of the X-rays illuminating an object whereby the coherence factorσof an illumination optical system is freely adjustable and the deformed illumination such as ring or oblique illumination can be made. It enables illumination in an optimum condition for the shape and size of a pattern to be transferred and exposure condition such as resist characteristic or nature of an observation sample and hence the image-forming performance such as resolution and depth of focus can be improved.