发明名称 DEVELOPING METHOD
摘要 PROBLEM TO BE SOLVED: To form the uniform liq. film of a developer, to reduce nonuniform development and to effectively remove the residue by providing an auxiliary developing stage for using and then discarding a developer before or after regular development. SOLUTION: An auxiliary developing stage for using and then discarding a developer is provided before or behind a developing chamber A for regular development. A curtain-flow nozzle 2a for uniformly discharging a developer 1, for example, in the form of curtain is furnished to a developing chamber B provided before the developing chamber A, the developer is dripped on a body 4 to be developed, and the dripped waste liq. is used, discarded and subjected to waste liq. treatment. The developer is sprayed from the nozzle 2a on the body 4 almost without any surplus pressure but only by gravity. Consequently, the developer 1 is not immediately scattered from the body 4 surface by the pressure of the developer 1 itself, and the developer 1 is softly retained on the body 4 surface by surface tension to form a coating film.
申请公布号 JPH09297405(A) 申请公布日期 1997.11.18
申请号 JP19960113638 申请日期 1996.05.08
申请人 TOPPAN PRINTING CO LTD 发明人 HANEDA AKIO;DOCHI KATSUNORI
分类号 G03F7/30;H01L21/027;(IPC1-7):G03F7/30 主分类号 G03F7/30
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