发明名称 VESSEL EXHAUST AIR METHOD AND APPARATUS FOR LEAKAGE DETECT
摘要 PURPOSE:To disuse the protective device for the load reduction of an exhaust air pump by equalizing the pressure of an exhaust completion vessel and an exhaust starting vessel through joint lines, in the method for exhausting several vessels, and to reduce an exhaust time.
申请公布号 JPS52100617(A) 申请公布日期 1977.08.23
申请号 JP19760016477 申请日期 1976.02.19
申请人 TOKYO SHIBAURA ELECTRIC CO 发明人 SAKURAI SADAO;TSUCHIYA TAKEO
分类号 F17C13/04;B65G53/36 主分类号 F17C13/04
代理机构 代理人
主权项
地址