WORKPIECE LASER MACHINING PROCESS

摘要

In a process for machining workpieces (10) with laser radiation (11), the irradiated machining area (12) is monitored by a measurement technique by means of which response signals (26) are determined and a process parameter (16) is modulated with an excitation frequency ( omega ). In order to prevent a process state to exceed a predetermined limit, the process state is monitored to check if it approaches said predetermined limit. In order to carry out this process even on non-coated workpieces, and in particular without requiring equivalent thermal networks of the workpieces to be machined, the alternating fractions (UM1(t)sin( omega t+ THETA )) of measurement signals (14) of at least one excitation frequency ( omega ) are used to determine the response signals (26), the machining-specific relation between the response signals and the process parameter (16) at the excitation frequency ( omega ) is predetermined, and the response signals (26) are used to monitor and/or regulate the process state, depending on said relation.