| 摘要 |
<p>A peak processing method for a confocal optical apparatus which has a plurality of confocal optical systems arranged two-dimensionally, and a light source of a high coherence, comprising the step of determining the height of a peak by sampling in the direction of the height thereof an actual output waveform Vs of Z-V profile, in which a periodic vibration waveform Vc of the above-mentioned light source is superposed on a theorical confocal output waveform Vt, characterized in that the sampling period is an integral multiple of the height Zt of the actual output waveform Vs of the Z-V profile, and the value of the height of the peak of this intermittently outputted Z-V output is found.</p> |
