发明名称 Polykristallines Substrat aus Diamant sowie Verfahren zur dessen Herstellung
摘要 A diamond substrate (1) having a smooth surface, including a polycrystalline diamond film having a surface with a pit (2), and an insulating material other than diamond, which occupies the pit. <IMAGE>
申请公布号 DE69404347(T2) 申请公布日期 1997.11.13
申请号 DE1994604347T 申请日期 1994.02.10
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD., OSAKA, JP 发明人 HIGAKI, KENJIRO ITAMI WORKS OF SUMITOMO, ITAMI-SHI, HYOGO, JP;NAKAHATA, HIDEAKI ITAMI WORKS OF SUMITOMO, ITAMI-SHI, HYOGO, JP;HACHIGO, AKIHIRO ITAMI WORKS OF SUMITOMO, ITAMI-SHI, HYOGO, JP;SHIKATA, SHINICHI ITAMI WORKS OF SUMITOMO, ITAMI-SHI, HYOGO, JP
分类号 C23C16/27;C23C16/56;H03H9/02;(IPC1-7):C23C16/26;C30B29/04;H03H9/25 主分类号 C23C16/27
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