| 摘要 |
<p>A noncontact inspection apparatus used to inspect an object material (18) transferred thereto, by noncontact inspection equipment, and judge whether the object material is good or not, the apparatus being provided with an annular rotary table (12) adapted to be turned and transfer an object material, an inspection equipment mounting table (14) disposed so as to be positioned on the inner and outer sides of the rotary table, and mounted with an object material inspecting CCD camera (32), a rotary head (80) supported above the rotary table so that the rotary head can be turned around the center of rotation of the rotary table, and holding an upper portion of the object material transferred on the rotary table, and an interlocking mechanism (92) adapted to turn the rotary head synchronously with the rotary table. This enables the inspecting capability of the noncontact inspection equipment to be fully displayed, the arrangement of the inspection equipment to be determined more freely, and the inspection of an object material by the inspection equipment to be carried out extensively with a high accuracy.</p> |
