Imaging system has scintillator between charged electrodes

摘要

A scintillator (4) for converting a particle beam into alight beam, where the novelty is that electrodes (15,17) apply a variable voltage (16) to preferred planes of the scintillator (4), so that a beam of charged particles is scattered and widened. Also claimed is an imaging device which uses the above scintillator to convert a particle beam emitted by one electrode, into light; a photosensor; and an optical element between the scintillator and the photosensor. Also claimed are systems which generate images from charged particles emitted by a test specimen, in e.g. in a research electron microscope.