发明名称 Vorrichtung zur ortsgenauen Fixierung von Mikrochips
摘要 The invention relates to a device for precise location of a microchip (1) on a carrier (2). Accurate adjustment of the microchip is monitored with an optical position monitoring system (3) with a camera (5) and a projection lens (4) pointing towards the microchip (1). According to the invention, heat rays are fed into the position monitoring system (3) and directed by the same projection lens (4) to the microchip (1). Consequently, the heat energy is guided to exactly the right point.
申请公布号 DE19618533(A1) 申请公布日期 1997.11.13
申请号 DE19961018533 申请日期 1996.05.08
申请人 SIEMENS AG, 80333 MUENCHEN, DE 发明人 BOGNER, GEORG, DIPL.-PHYS., 93051 REGENSBURG, DE;ALTHAUS, LUDWIG, DIPL.-PHYS. DR., 93138 LAPPERSDORF, DE
分类号 H01L21/52;B23K1/005;B23K26/04;H01L21/68;H05K13/04;(IPC1-7):H01L21/58;H01L21/60;H05K3/34 主分类号 H01L21/52
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