SURFACE ACOUSTIC WAVE ELEMENT AND METHOD FOR MANUFACTURING THE SAME

摘要

The dielectric film (102) of a surface acoustic wave element (100) constituted of a piezoelectric substrate (101) composed of Li2B4O7 (LBO), the dielectric film (102), which is formed on the substrate (101), is composed of SiO2, and has a thickness (h), and a comb-shaped electrode (103b) which is formed on the film (102) at a pitch L and composed of an aluminum thin film is formed by selecting the thickness and specific inductive capacity of the film (102) so that the electromechanical coupling factor K2 can become about 0.74 % or larger.