| 摘要 |
A micromechanical pressure and force sensor (1) has a base plate (2) on each side of which membrane plates (3) are disposed. The membrane plates (3) are interconnected in a force-locking manner by a coupling element (9). When the external forces acting on the membrane plates (3) differ, the spacings between the membrane plates (3) and the base plate (2) vary. The variation in the spacings can be detected by means of a capacity measurement using the measuring electrodes (21) and the counter electrodes (23). The micromechanical pressure and force sensor (1) is suitable in particular for use as a differential pressure sensor. |
