Verfahren zum Diagnostizieren einer Oberfläche und anschließendem selektiven Abtragen von Schichten

摘要

In an apparatus for the diagnosis of a surface and the subsequent selective removal of layers from the surface by a pulsed laser beam 1, areas of the surface to be diagnosed being repeatedly illuminated and the light reflected from the il-luminated surfaces being diffracted into spectral ranges whose intensities are measured and compared with standards and de-pending on this comparison layers are removed by the pulsed laser beams 1 from the surface areas diagnosed, the spaces in which the diagnosis of the surface areas and the laser irradiation procedures are performed, are spatially separated and sealed from one another so as to prevent dust and light contamination of the diagnosis space.