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发明名称
Dry etching method
摘要
申请公布号
EP0258698(B1)
申请公布日期
1997.11.12
申请号
EP19870111690
申请日期
1987.08.12
申请人
HITACHI, LTD.
发明人
OKUDAIRA, SADAYUKI;TSUJIMOTO, KAZUNORI;TACHI, SHINICHI
分类号
H01L21/302;H01L21/3065;H01L21/3213;(IPC1-7):H01L21/306;C23F4/00;H01L21/31
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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