| 摘要 |
<p>A micromechanical optical modulator, and methods for operating the modulator are disclosed. The modulator has a membrane supported over a region of a substrate. At least two electrodes, and preferably more, are disposed on the membrane. Each electrode is in electrical contact with a controlled voltage source through a shift register for sequentially applying a voltage to the electrodes. An optical window for receiving an optical signal is defined between two adjacent electrodes. In operation, a voltage pulse is applied to the substrate and each of the electrodes. As the voltage is applied, an electrostatic force is generated, drawing the membrane towards the substrate and thereby generating a mechanical pulse in the membrane beneath each electrode. The pulses are propagated through the membrane to the optical window. The voltage pulses are timed so that the mechanical pulses reinforce one another creating a pulse or displacement in the membrane at the optical window equivalent to the sum of the pulses generated by each electrode. As the membrane is displaced from its initial position and moves toward the substrate, there is a change in an optical property of the modulator, such as its reflectivity to an optical signal. Thus, by changing the position of the optical window, relative to the substrate, an optical signal can be modulated.</p> |
