| 摘要 |
PURPOSE:To eliminate the need for a guide line and to perform a test with good workability by providing a memory means storing the arrangement information of plural filters arranged in a clean room and providing a control means for travel-controlling an unmanned traveling truck based on this arrangement information, the distance and direction of the unmanned travel truck. CONSTITUTION:The traveling distance of an unmanned traveling truck 10 is detected by a distance sensor, the touch sensor 22 fitted to the manipulator 12 located on this truck is moved along the contour of a filter and the direction of the unmanned traveling truck 10 for the filter is decided by a decision means based on the detection signal thereof. Moreover, the arrangement information of plural filters arranged in a clean room is stored in advance in a memory means, the unmanned travel truck 10 is controlled by a control means based on this arrangement information, the traveling distance of the truck 10 and the direction thereof, this truck 10 is stopped just under the filter, the manipulator 12 is controlled by driving and the leak test of the filter is performed by the probe 14 for measuring provided on the manipulator 12. |
