MOVEMENT CONTROL METHOD

摘要

PROBLEM TO BE SOLVED: To enable a stage to be highly accurately positioned at a prescribed target position by one or two correctional actions. SOLUTION: A movement device is equipped with a guide means mounted on a frame 100, a slide member 5 which is movable as guided by the guide means, a drive means 12 which moves the slide member 5, a position detector 11 which is capable of continuously detecting the position of the slide member 5, a reference means provided to the slide member 5, a measuring means 8 capable of measuring the position of the reference means, and a control means 9 which controls the drive means 12 receiving signals emitted from the position detector 11 so as to enable it to move and control the slide member 5. A movement control method is carried out through such a manner that errors of position detection made by the position detector 11 are previously measured and stored in the control means 9, and when the slide member 5 is moved to a predetermined target position, a necessary movementΔX front the position of the reference means measured by the measuring means 8 to a target position is obtained, furthermore a position detection error e before a movement is made and a position detection error e0 after the slide member 5 is moved by a distance ofΔX are estimated basing on the position detection error stored in the control means 9, then a movement instruction given to the drive means 12 is calculated at a distance ofΔX-(e0 -e)}, and the slide member 5 is moved.