| 摘要 |
PROBLEM TO BE SOLVED: To provide a developing device, which can maintain constant a developing in a process of developing a photosensitive resin film and is never readhered with mists, and a method of developing the resin film. SOLUTION: A developing device is provided with a temperature control unit 21 for keeping the temperature atmosphere 25 in a developing device interior 26 at a constant temperature and an upper unit 16 formed with temperature atmosphere feed openings 13 for feeding the atmosphere 25, and has the units 21 and 16 connected with each, so that the developing of a P-type resist film 23 can be performed in the atmosphere 25 of the constant temperature. |
